Photosensitive resin composition and adhesion promoter
AssigneeToray Industries, Inc.
InventorsTomoyuki Yuba, Yoji Fujita, Masao Tomikawa
Life of this patent
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Abstract
The present invention provides a photosensitive resin composition comprising (a) an alkali-soluble resin, (b) a silicon compound having a secondary aromatic amino group and an alkoxy group, and (c) at least one selected from a photopolymerization initiator, a photo acid generator and a photo base generator. According to the present invention, it is possible to obtain a photosensitive resin composition which remarkably enhances the adhesion property with a substrate after curing without deteriorating storage stability of a solution, and does not cause peeling of a fine pattern even upon development.
Claims5
A photosensitive resin composition comprising (a) an alkali-soluble resin, (b) a silicon compound having a secondary aromatic amino group and an alkoxyl group, and (c) at least one substance selected from a photopolymerization initiator, a photo acid generator and a photo base generator, wherein the silicon compound having a secondary aromatic amino group and an alkoxy group (b) is selected from compounds represented by the general formulas (1) to (3):
- R1, R7, R11, R12 and R13 each represents a group selected from an organic group having 1 or more and 10 or less carbon atoms, a hydroxyl group, a nitro group, an amino group and a carboxyl group;
- R2, R3, R4, R8, R9, R10, R17, R18 and R19 each represents a group selected from a hydrogen atom, an alkyl group having 1 to 6 carbon atoms, an alkenyl group, a phenyl group and a substituted phenyl group, of which R2 and R4, R8 and R10, or R17 and R19 each may be combined to form an aliphatic cyclic structure;
- R5, R6 and R20 each represents a group selected from an alkyl group having 1 to 6 carbon atoms, an alkenyl group, a phenyl group, a substituted phenyl group and an alkoxy group having 1 to 6 carbon atoms, at least one of which is an alkoxy group having 1 to 6 carbon atoms;
- R14, R15 and R16 each represents a group selected from an alkyl group having 1 to 6 carbon atoms,
- an alkenyl group, a phenyl group, a substituted phenyl group and an alkoxy group having 1 to 6 carbon atoms, at least one of which is an alkoxy group having 1 to 6 carbon atoms;
- X represents a group selected from an alkyl group having 1 to 10 carbon atoms, an alkylene group, a nitro group, a hydroxyl group, an alkoxy group, a carboxyl group, an ester group having 2 to 10 carbon atoms and an amide group having 2 to 10 carbon atoms;
- Y represents a group selected from a single bond, a phenyl group and a —CH2O— group;
- XX and YY each represents a single bond or a group selected from the following:
- wherein R21 and R22 each represents a group selected from hydrogen, fluorine, an alkyl group having 1 to 10 carbon atoms, a fluorinated alkyl group having 1 to 10 carbon atoms and an alkoxy group having 1 to 10 carbon atoms;
- p, q, s, u and v each represents an integer of 1 to 4;
- m represents an integer of 1 to 3;
- 1 represents an integer of 0 to 2, a, b, k and n each represents an integer of 0 to 10;
- d, f and g each represents an integer of 1 to 4;
- t and h each represents an integer of 1 to 100;
- and j represents an integer of 1 to 3.
Dependencies are inferred from the claim text.