Yield prediction feedback for controlling an equipment engineering system
AssigneeApplied Materials, Inc.
InventorsJames Moyne, Nicholas Ward, Richard Stafford
Life of this patent
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Abstract
A yield prediction is received by a scheduling and dispatch controller, wherein the yield prediction is associated with a manufacturing tool and a product. A weighting of the manufacturing tool is adjusted in a routing algorithm based on the yield prediction. A cost-benefit analysis is computed that identifies a cost and a benefit of manufacturing future products on the manufacturing tool. A determination is made regarding whether to process a future product on the manufacturing tool based on the cost-benefit analysis.
Claims12
A computer implemented method comprising:
- receiving a yield prediction and a yield prediction confidence by a scheduling and dispatch controller, wherein the yield prediction is associated with a manufacturing tool and a product and the yield prediction confidence is associated with the yield prediction;
- adjusting a weighting of the manufacturing tool in a routing algorithm based on the yield prediction and the yield prediction confidence;
- computing a cost-benefit analysis that identifies a cost and a benefit of manufacturing future products on the manufacturing tool;
- and
- determining whether to process a future product on the manufacturing tool based on the cost-benefit analysis.
A non-transitory computer readable medium including instructions that, when executed by a processing system, cause the processing system to perform a method comprising:
- receiving a yield prediction and a yield prediction confidence by a scheduling and dispatch controller, wherein the yield prediction is associated with a manufacturing tool and a product and the yield prediction confidence is associated with the yield prediction;
- adjusting a weighting of the manufacturing tool in a routing algorithm based on the yield prediction and the yield prediction confidence;
- computing a cost-benefit analysis that identifies a cost and a benefit of manufacturing future products on the manufacturing tool;
- and
- determining whether to process a future product on the manufacturing tool based on the cost-benefit analysis.
An equipment engineering system comprising:
- one or more memories to store instructions for a yield predictor and for a scheduling and dispatch controller;
- and
- one or more processors, connected to the one or more memories, to execute the instructions;
- wherein
- the yield predictor to make a yield prediction and to compute a yield prediction confidence for the yield prediction, wherein the yield prediction is associated with a manufacturing tool and a product;
- and
- the scheduling and dispatch controller to receive the yield prediction and the yield prediction confidence, to adjust a weighting of the manufacturing tool in a routing algorithm based on the yield prediction and the yield prediction confidence, to compute a cost-benefit analysis that identifies a cost and a benefit of manufacturing future products on the manufacturing tool, and to determine whether to process a future product on the manufacturing tool based on the cost-benefit analysis.
Dependencies are inferred from the claim text.