Micromechanical device and method of manufacturing micromechanical device

A method of manufacturing a micromechanical device comprising:

• a step of arranging a micromachine which is formed of a conductive material into a beam-like shape, is deformed by a function of an electric field, and changes electric characteristics concomitantly with the deformation, on a principal surface of a substrate on which a signal line is provided;
• a step of arranging deformation restraint sections each constituted of a material having a higher viscosity coefficient than the conductive material, for restraining deformation of the micromachine by which the micromachine is separated from the signal line, on the opposite side of the micromachine to the signal line;
• a step of coating a synthetic resin material on the micromachine;
• a step of covering surfaces of the synthetic resin material with a cover section;
• a step of forming a sacrificial layer on the micromachine and the deformation restraint sections;
• a step of forming a first sealing body covering the micromachine with the sacrificial layer located therebetween, and including opening shape sections communicating with the sacrificial layer, on the sacrificial layer and the principal surface of the substrate;
• a step of introducing a fluid for removing the sacrificial layer from the opening shape sections to thereby remove the sacrificial layer;
• and
• a step of forming a second sealing body on the first sealing body to thereby block the opening shape sections.