Single scan irradiation for crystallization of thin films

A method of processing a selected region of a film on a substrate in a single scan, comprising:

• generating a plurality of laser beam pulses;
• directing the plurality of laser beam pulses through a mask to generate a plurality of patterned laser beams;
• irradiating a portion of a selected region of a film with one of the plurality of patterned beams, said beam having an intensity that is sufficient to melt the irradiated portion of the film, wherein the irradiated portion of the film crystallizes upon cooling,
• moving the film along a first translation pathway and moving the mask along a second translation pathway while successive portions of the selected region are irradiated with patterned beams, such that the selected region of the film is substantially completely crystallized in a single traversal of the patterned beams over the selected region of the film;
• wherein the film moves in a constant direction along the first translation pathway during a single traversal of the patterned beams over the selected region of the film.