Nanotube growth and device formation
AssigneeIntel Corporation
InventorsValery M. Dubin, Juan E. Dominguez, Chin-Chang Cheng
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Abstract
An apparatus and method for forming catalyst particles to grow nanotubes is disclosed. In addition, an apparatus and method for forming nanotubes using the catalytic particles is also disclosed. The particles formed may have different diameters depending upon how they are formed. Once formed, the particles are deposited on a substrate. Once deposited, the mobility of the particles is restricted and nanotubes and/or nanotube portions are grown on the particles. Nanotube portions having different diameters may be formed and the portions may be connected to form nanotubes with different diameters along the length of the nanotube.
Claims11
A method, comprising:
- forming a first portion of a nanotube with a first diameter;
- after forming the first portion, attaching the first portion of a nanotube to a particle;
- and
- after attaching, forming a second portion of the nanotube with a second diameter on the particle coupled to the first portion of the nanotube.
A method comprising:
- exposing a first nanotube portion to one of a carboxyl functional group and an amine functional group;
- exposing a particle to the other of a carboxyl functional group and an amine functional group;
- attaching the first nanotube portion to the particle;
- and
- forming a second nanotube portion on the particle and coupled to the first nanotube portion, the first portion and second portion collectively defining a composite nanotube.
Dependencies are inferred from the claim text.