Enhanced magnetic plating method
AssigneeInternational Business Machines Corporation
InventorsMatteo Flotta, Lubomyr Taras Romankiw, Xiaoyan Shao, Steven Erik Steen, Bucknell Chapman Webb
Life of this patent
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Abstract
An apparatus for plating a magnetic film on a substrate includes: a track including a plurality of stopping points along the track; a permanent magnet placed on the track such that the permanent magnet can be moved along the track towards and away from the stopping points; at least one plating tank positioned on the stopping point; and a removable high permeability iron flux concentrator inserted into gaps between the substrate and inside walls of the plating tank, substantially surrounding the substrate and extending around and under the substrate.
Claims11
A method for enhancing a magnetic field when plating magnetic film on a substrate, the method comprising:
- loading the substrate into a plating tank;
- introducing a conformable flux concentrator into the plating tank, wherein the conformable flux concentrator is inserted into gaps between the substrate and inside walls of the plating tank, substantially surrounding the substrate and extending around and under the substrate;
- positioning a magnet around the plating tank;
- electroplating the substrate using the magnet to magnetize the conformable flux concentrator;
- relatively moving the magnet away from the plating tank;
- and
- removing the substrate from the plating tank.
A method for plating magnetic film on a substrate, the method comprising:
- mounting a permanent magnet on a track comprising a plurality of stopping points, wherein the permanent magnet is movable along the track;
- positioning a first cell on a first stopping point, wherein the first cell comprises an aqueous solution and the substrate is disposed within the aqueous solution;
- inserting a conformable flux concentrator into the first cell, such that the conformable flux concentrator is inserted into gaps between the substrate and inside walls of the first cell, substantially surrounding the substrate and extending around and under the substrate;
- moving the permanent magnet along the track to the first stopping point wherein the magnet surrounds the first cell when positioned;
- and wherein the permanent magnet magnetizes the substrate disposed within the first cell, wherein the magnetization is facilitated by the conformable flux concentrator, and electroplating a magnetic film onto the substrate;
- and
- moving the permanent magnet along the track to a second stopping point to facilitate removal of the substrate and the conformable flux concentrator.
A method for plating magnetic film on a substrate, the method comprising:
- aligning a track comprising a plurality of stopping points along an x plane of a permanent magnet, wherein the permanent magnet is disposed over a first stopping point;
- mounting an electrolytic cell on the track, wherein the electrolytic cell is movable along the track and wherein the electrolytic cell comprises an aqueous solution and the substrate is disposed within said aqueous solution;
- inserting a conformable flux concentrator into the electrolytic cell, such that the conformable flux concentrator is inserted into gaps between the substrate and inside walls of the electrolytic cell, substantially surrounding the substrate and extending around and under the substrate;
- moving the electrolytic cell to the first stopping point on the track wherein the permanent magnet surrounds the electrolytic cell when positioned;
- and wherein the permanent magnet magnetizes the substrate disposed within the electrolytic cell, wherein the magnetization is facilitated by the conformable flux concentrator, and electroplating a magnetic film onto the substrate;
- and
- moving the electrolytic cell along the track to a second stopping point to facilitate removal of the substrate and the conformable flux concentrator.
Dependencies are inferred from the claim text.