Integrated sensor and magnetic field concentrator devices
AssigneeInfineon Technologies AG
InventorUdo Ausserlechner
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Abstract
Embodiments of the invention are related to integrated sensor and magnetic concentrator devices and methods. In one embodiment, an integrated circuit comprises a sensor device and a magnetic field concentrator. The sensor device comprises a first sensor element, a second sensor element, and a third sensor element, the first sensor element spaced apart from the third sensor element by a first gap, and the second sensor element spaced apart from the third sensor element by a second gap. The magnetic field concentrator comprises a first magnetic element disposed in the first gap and a second magnetic element disposed in the second gap.
Claims23
An integrated circuit comprising:
- a speed sensor device comprising a first speed xMR sensor element, a second speed xMR sensor element, and a third direction xMR sensor element, the first sensor element spaced apart from the third sensor element by a first gap, and the second sensor element spaced apart from the third sensor element by a second gap;
- and
- a magnetic field concentrator comprising a first magnetic element disposed in the first gap and a second magnetic element disposed in the second gap.
A method comprising:
- providing an integrated circuit comprising a speed sensor and a magnetic field concentrator, the speed sensor comprising a first speed xMR sensor element, a second speed xMR sensor element, and a third direction xMR sensor element;
- exposing the integrated circuit to a magnetic field;
- and
- guiding a magnetic flux perpendicularly to the speed sensor by the magnetic field concentrator.
An integrated circuit comprising:
- a first speed xMR sensor element;
- a second speed xMR sensor element spaced apart from the first sensor element;
- a third direction xMR sensor element arranged between the first and second speed xMR sensor elements;
- a first magnetic element arranged between the first and third sensor elements;
- and
- a second magnetic element arranged between the second and third sensor elements and forming a magnetic field concentrator in combination with the first magnetic element.
An integrated circuit comprising:
- a speed sensor device comprising at least two xMR sensor elements spaced apart from each other on a die to form a first gap and at least one additional xMR sensor element comprising a direction xMR sensor element disposed in the first gap between the at least two xMR sensor elements;
- and
- a magnetic field concentrator disposed in the first gap and configured to guide magnetic flux from an external source in a direction perpendicular to the at least two xMR sensor elements.
Dependencies are inferred from the claim text.