# US 7,956,333 B2 · Moving module of a wafer ion-implanting machine

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- Number: US 7,956,333 B2
- Document ID: US7956333B2
- Status: Granted
- Kind: B2
- Application number: 12/457,929
- Filed: 2009-06-25
- Published: 2010-09-02
- Granted: 2011-06-07
- Earliest claimed: 2009-03-02
- Assignees: Inotera Memories, Inc.
- Inventors: Ting-Wei Lin
- Web page: https://patentgrep.com/patent/US7956333B2

## CPC

- H01J 37/3171: {for ion implantation}
- H01J 37/023: {Means for mechanically adjusting components not otherwise provided for}
- H01J 37/20: Means for supporting or positioning the object or the material; Means for adjusting diaphragms or lenses associated with the support
- H01J 2237/0216: Means for avoiding or correcting vibration effects
- H01J 2237/20221: Translation
- H01J 2237/20257: Magnetic coupling
- H01J: ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS (spark-gaps H01T; electric arc lamps H05B31/00; particle accelerators H05H)

## Abstract

A moving module of a wafer ion-implanting machine includes a wafer carrier, a moving shaft, a base, a pair of first magnets, a fixture body, and a plurality of second magnets. One end of the wafer carrier is pivotally connected to a wafer tray; and the other end is fixed onto one end of the moving shaft. The base is fixed to the other end of the moving shaft. The moving shaft drives the wafer carrier and the base to move lengthwise. The pair of first magnets is fixed to the base. The fixture body is located between the pair of first magnets. The second magnets are fixed onto the fixture body and one of them forms compelling magnetic force between one of the first magnets. Thereby, the friction generated by contacting any of the first magnets with the fixture body can be prevented, thus increasing the production yield.

## Claims

### Claim 1

A moving module of a wafer ion-implanting machine, comprising:
a wafer carrier, one end of which is pivotally connected to a wafer tray;
a moving shaft, one end of which is fixed to the other end of the wafer carrier so that the moving shaft drives the wafer carrier to move lengthwise;
a base, which is fixed to the other end of the moving shaft so that the moving shaft drives the base to move lengthwise;
a pair of first magnets, which are fixed to the base;
a fixture body, which is located between the pair of first magnets; and
a plurality of second magnets, which are fixed onto the fixture body and form a compelling magnetic force between themselves and the first magnets.

### Claim 2 (depends on 1)

The moving module of claim 1, wherein the first magnets are permanent magnets.

### Claim 3 (depends on 1)

The moving module of claim 1, wherein the first magnets are electrically induced magnets.

### Claim 4 (depends on 1)

The moving module of claim 1, wherein the second magnets are permanent magnets.

### Claim 5 (depends on 1)

The moving module of claim 1, wherein the second magnets are electrically induced magnets.

### Claim 6 (depends on 1)

The moving module of claim 1, wherein the amount of the second magnets on each side of the fixture body is equal.

### Claim 7 (depends on 1)

The moving module of claim 1, wherein there is a gap between each of the second magnets and each of the first magnets.

### Claim 8 (depends on 1)

The moving module of claim 1, wherein the first magnets and the second magnets are in the shape of rectangle with the same size.

### Claim 9

A moving module of a wafer ion-implanting machine, comprising:
a wafer carrier, one end of which is pivotally connected to a wafer tray;
a moving shaft, one end of which is fixed to the other end of the wafer carrier so that the moving shaft drives the wafer carrier to move lengthwise;
a base, which is fixed to the other end of the moving shaft so that the moving shaft drives the base to move lengthwise;
a pair of magnets, which are fixed to the base; and
a fixture body, which is located between the pair of magnets, and is magnetic so that the pair of magnets maintain a compelling magnetic force between opposite sides of the fixture body.

### Claim 10 (depends on 9)

The moving module of claim 9, wherein the magnets are permanent magnets.

### Claim 11 (depends on 9)

The moving module of claim 9, wherein the magnets are electrically induced magnets.

### Claim 12 (depends on 9)

The moving module of claim 9, wherein the fixture body is permanent magnets.

### Claim 13 (depends on 9)

The moving module of claim 9, wherein the fixture body is electrically induced magnets.

### Claim 14 (depends on 9)

The moving module of claim 9, wherein the amount of second magnets on each side of the fixture body is equal.

### Claim 15 (depends on 9)

The moving module of claim 9, wherein there is a gap between the fixture body and the magnets.

### Claim 16 (depends on 9)

The moving module of claim 9, wherein at least one of the magnets has a length smaller than the fixture body.