Plasma display panel manufacturing method
AssigneePanasonic Corporation
InventorDaisuke Adachi
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Abstract
The present invention provides a method of manufacturing a PDP that prevents defects due to dust adhering to a photomask, for example, from occurring in a structure of the PDP. In photolithography, exposure is performed twice in a same process, and photomask (22) is moved within an allowable range of displacement in an exposure pattern, between a first and a second exposures. Photomask (22) is exposed twice in total before and after moving photomask (22). Region (21a), an unexposed region due to interruption of dust (22b) attached to photomask (22), can be suppressed, enabling pattern exposure on photosensitive Ag paste film (21) to be favorably performed.
Claims4
A method of manufacturing a plasma display panel, in which a plurality of structures of the plasma display panel are formed with photolithography, wherein a position on a photosensitive material corresponding to one of the structures of the plasma display panel is exposed twice using successive first and second exposures, each of the structures extends primarily in a lengthwise direction and has a width w in a widthwise direction orthogonal to the lengthwise direction, and a photomask and the photosensitive material are moved in the widthwise direction relative to each other by a distance less than w between the first and second exposures.
A method of manufacturing a plasma display panel, in which a plurality of electrodes, disposed periodically with a pitch p, of the plasma display panel are formed with photolithography, wherein a position on a photosensitive material corresponding to one of the electrodes is exposed twice using successive first and second exposures, exposure parts of a photomask for forming the electrodes are disposed periodically with the pitch p, and a photomask and the photosensitive material are moved relative to each other by two or more integral times the distance p between the first and second exposures.
Dependencies are inferred from the claim text.