Fluid storage and dispensing systems, and fluid supply processes comprising same

A method of manufacturing a radiation-interactive product article in a process facility adapted for manufacture thereof, comprising coupling the process facility with a fluid storage and dispensing vessel containing a physical sorbent medium having sorptive affinity for a fluid of interest useful in manufacture of the radiation-interactive product article, whereby the fluid storage and dispensing vessel is coupled in-dispensing flow communication with the process facility, to flow said fluid of interest thereto, and wherein the radiation-interactive product article comprises an article selected from the group consisting of light-interactive members, light-transmissive members, and optical windows.

A fluid storage and dispensing package, including a first vessel containing physical sorbent adapted for sorptively holding a fluid, and desorbing the fluid under dispensing conditions, and a second vessel adapted to contain a supply volume of said fluid for said first vessel, said second vessel containing a fluid pressure regulator in an interior volume thereof, and a fluid discharge structure coupled to the first vessel to discharge fluid therefrom under said dispensing conditions, the first vessel and second vessel being coupled with one another to allow flow of said fluid from the second vessel to the first vessel, and the fluid pressure regulator being set at a set point that maintains the physical sorbent loaded with fluid by said flow of said fluid from the second vessel to the first vessel.

A processing installation including a large-scale, fixedly positioned fluid storage and dispensing vessel containing a physical sorbent medium having sorptive affinity for a fluid of interest useful in manufacture of a microelectronic product, and a process tool that uses the fluid for manufacture of a microelectronic product, wherein the fluid storage and dispensing vessel is positioned remotely from the process tool, and wherein the fluid storage and dispensing vessel is interposed between a production facility producing said fluid and a process facility containing the process tool, and arranged so that the fluid storage and dispensing vessel receives fluid from the production facility and dispenses fluid to the process facility for use by the tool therein, whereby the fluid storage and dispensing vessel provides buffering of fluid flows from the production facility and fluid flows to the process facility for use by the process tool therein.