Device and method for performing X-ray analysis
AssigneePANalytical B.V.
InventorsGustaaf Christian Simon Brons, Petronella Emerentiana Hegeman
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Abstract
The invention relates to a device for performing X-ray analysis. Device 1 comprises an X-ray tube 2 and at least one capillary lens 4 for focusing the X-rays in a micro-region at a location 5 for a sample for analysis. Device 1 further comprises a detector 6 for detecting X-ray fluorescence from the sample. Device 1 further comprises at least one energy-dependent filter 3 placed between the X-ray tube 2 and the capillary lens 4. The filter 3 is adapted to substantially block X-rays with an energy which is lower than a predetermined threshold value.
Claims7
A method for performing X-ray analysis using a device (1) comprising an X-ray tube (2) and at least one capillary lens (4) for focusing the X-rays in a micro-region at a location (5) for a sample for analysis, in addition to a detector (6) for detecting X-ray fluorescence from the sample, wherein the device further comprises at least one energy-dependent filter (3) placed in the optical path between the X-ray tube and the location (5), characterized in that the method comprises the steps of:
- a) determining the desired maximum dimensions (Xmax) for the micro-region;
- b) determining the energy (Emax) of the X-rays associated with the desired maximum dimensions (Smax) for the micro-region;
- c) selecting a filter (3) which is adapted to block in considerable measure X-rays with an energy which is equal to or lower than a predetermined energy value, wherein the energy value is chosen to be substantially equal to the energy (Emax) determined in step b),
- such that the dimensions of the micro-region (Smax) are substantially bounded within predetermined permissible values.
Dependencies are inferred from the claim text.