Photoresist-free metal deposition
AssigneeNovellus Systems, Inc.
InventorsSteven T. Mayer, John Stephen Drewery, Eric G. Webb
Life of this patent
Estimating the term…
Abstract
Selectively accelerated or selectively inhibited metal deposition is performed to form metal structures of an electronic device. A desired pattern of an accelerator or of an inhibitor is applied to the substrate; for example, by stamping the substrate with a patterned stamp or spraying a solution using an inkjet printer. In other embodiments, a global layer of accelerator or inhibitor is applied to a substrate and selectively modified in a desired pattern. Thereafter, selective metal deposition is performed.
Claims21
A method of selectively removing portions of a metal layer from a substrate during fabrication of an electronic device, the method comprising:
- providing a counterelectrode above an additive layer above a metal layer located on a substrate surface, wherein the additive layer comprises accelerator;
- generating a positive voltage bias in said metal layer located on said substrate;
- providing a high-resistivity electrolyte liquid on said substrate surface;
- providing a cationic membrane;
- providing a low-resistivity electrolyte liquid between said cationic membrane and said counterelectrode;
- contacting said substrate surface with a contact surface of a cationic membrane, said contact surface comprising a membrane pattern comprising raised and recessed areas, the membrane pattern corresponding to said desired metal pattern, thereby substantially displacing said high-resistivity electrolyte liquid from said substrate surface and thereby forming a pocket of high-resistivity liquid electrolyte between said cationic membrane and said substrate corresponding to a negative portion on said membrane contact surface;
- and
- removing portions of the additive layer under the pocket by anodic dissolution.
A method of selectively removing portions of a metal layer from a substrate during fabrication of an electronic device, the method comprising:
- providing a counterelectrode above an additive layer above a metal layer located on a substrate surface;
- generating a positive voltage bias in said metal layer located on said substrate;
- providing a high-resistivity electrolyte liquid on said substrate surface;
- providing a cationic membrane;
- providing a low-resistivity electrolyte liquid between said cationic membrane and said counterelectrode;
- contacting said substrate surface with a contact surface of a cationic membrane, said contact surface comprising a membrane pattern comprising raised and recessed areas, the membrane pattern corresponding to said desired metal pattern, thereby substantially displacing said high-resistivity electrolyte liquid from said substrate surface and thereby forming a pocket of high-resistivity liquid electrolyte between said cationic membrane and said substrate corresponding to a negative portion on said membrane contact surface;
- removing portions of the additive layer under the pocket by anodic dissolution;
- and
- after removing the portions of the additive layer, plating metal on the substrate, thereby forming metal protrusions, wherein topography of the metal protrusions mirrors topography of the contact surface.
Dependencies are inferred from the claim text.