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US 7,945,966 B2Granted
Nanometric emitter/receiver guides
OwnerTiberiu Minea, Guy Louarn +2inventors
InventorsTiberiu Minea, Guy Louarn, Guirec Ollivier, Marc Chaigneau
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Abstract
The invention relates to a nanoprobe comprising a silica fiber (2) with an end opening having a diameter of less than 100 nm, and a metallic sheath (11). The total diameter of the silica part and the metallic sheath (11) is less than 300 nm. The invention also relates to a method for producing one such nanoprobe.
Claims13
A method for manufacturing a nanoprobe from a silica optical fibre, the method comprising:
- plunging an end of said silica optical fibre into a chemical medium intended for etching in order to obtain a silica cone;
- cleaning said silica cone, wherein said cleaning comprising sub-steps of:
- placing said optical fibre on the axis of a substantially cylindrical hollow cathode, and
- generating a beam of electrons in said hollow cathode;
- depositing an opaque film made of a conductive material, on said silica cone of the silica optical fibre, wherein the steps of depositing the opaque film comprises sub-steps of:
- placing said silica optical fibre on an axis of said substantially cylindrical hollow cathode, wherein said cathode comprises the conductive material;
- and
- spraying said conductive material on said silica cone with the aid of a plasma in order to obtain said opaque film;
- and
- following the depositing of the opaque film, producing said aperture at the end of said silica cone, wherein said aperture is produced by a flat-tip filamentary discharge between the end of said silica cone covered with said metallic sheath and a substantially flat surface in order to obtain said aperture at the end of said silica cone,
- wherein said nanoprobe comprises said silica optical fibre having an end aperture with a diameter of less than 100 nm, and a metallic sheath, wherein the total diameter of said silica optical fibre and of said metallic sheath is less than 300 nm.
8 more elements
Dependencies are inferred from the claim text.