Alignment of printed circuit board targets

Apparatus for micromachining a material, comprising:

• a radiation source which is configured to provide illumination of an illumination wavelength to a site of the material via a given element of an optical system, the illumination generating returning radiation from the site;
• an image sensor which is configured to receive the returning radiation via the given element, and to form an image of the site therefrom;
• a beam source which is configured to generate a beam of micromachining radiation having a micromachining wavelength different from the illumination wavelength;
• and
• a processor which is configured to calculate an actual position of a location at the site from the image and to output a signal indicative of the actual position of the location, to position the beam to form an aligned beam with respect to the location in response to the signal, and to operate the beam source so that the aligned beam is conveyed to the location via at least the given element of the optical system so as to perform a micromachining operation at the location.