Photocathode lighting device, method for manufacturing the same and exposure apparatus using photocathode lighting device
AssigneePhotegra Corporation
InventorsHyo-Soo Jeong, Kristopher Warren Keller, Joseph Bradley Culkin
Life of this patent
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Abstract
The photocathode lighting device of planar light emission including: a light source unit emitting a first light; a cathode plate contacted face-to-face with the light source unit; a metal mask layer adhered to the cathode plate and including a repetitive plurality of apertures; a photocathode formed on a surface of the metal mask layer, receiving the first light, and emitting an electron; an anode plate facing the cathode plate and spaced apart from the cathode plate; and a phosphor formed in a lower part of the anode plate and emitting a second light when the emitted electron collides with the phosphor.
Claims18
An exposure apparatus comprising:
- a photocathode lighting device comprising:
- a light source unit emitting a first light;
- a cathode plate contacted face-to-face with the light source unit;
- a metal mask layer adhered to the cathode plate and including a repetitive plurality of apertures;
- a photocathode formed on a surface of the metal mask layer, receiving the first light, and emitting an electron;
- an anode plate facing the cathode plate and spaced apart from the cathode plate;
- and
- a phosphor formed in a lower part of the anode plate and emitting a second light when the emitted electron collides with the phosphor;
- and
- a stage supporting an exposed object projecting a pattern of a pattern mask by the second light,
- wherein the second light is incident perpendicular to a surface of the exposed object.
A photocathode lighting device comprising:
- a light source unit emitting a first light;
- a cathode plate contacted face-to-face with the light source unit;
- a metal mask layer adhered to the cathode plate and including a repetitive plurality of apertures;
- a photocathode formed on a surface of the metal mask layer, receiving the first light, and emitting an electron;
- an anode plate facing the cathode plate and spaced apart from the cathode plate;
- and
- a phosphor formed in a lower part of the anode plate and emitting a second light when the emitted electron collides with the phosphor.
A method of manufacturing a photocathode lighting device, the method comprising:
- forming a light source unit emitting a first light and a cathode plate contacted face-to-face with the light source unit;
- forming a metal mask layer adhered to the cathode plate and including a repetitive plurality of apertures;
- forming a photocathode on a surface of the metal mask layer, receiving the first light, and emitting an electron;
- forming an anode plate facing the cathode plate and spaced apart from the cathode plate;
- and
- forming a phosphor in a lower part of the anode plate, the phosphor emitting a second light when the emitted electron collides with the phosphor.
Dependencies are inferred from the claim text.