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AssigneeIntegrated Device Technology, Inc.
InventorsYe Wang, Harmeet Bhugra
Estimating the term…
Micro-electromechanical acoustic resonators include a resonator body suspended over a substrate. The resonator body may have a single perforation therein, which may extend substantially or completely therethrough. The resonator body may also be configured to have a center-of-mass within an interior of the perforation and/or a nodal line that overlaps the perforation. A perimeter and depth of the single perforation can be configured to reduce a susceptibility of the acoustic resonator to process-induced variations in resonant frequency relative to an otherwise equivalent resonator that omits the single perforation. In other embodiments, the resonator body may have multiple perforations therein that extend along a nodal line of the resonator.
A micro-electromechanical acoustic resonator, comprising:
A micro-electromechanical acoustic resonator, comprising:
A micro-electromechanical acoustic resonator, comprising:
A micro-electromechanical acoustic resonator, comprising:
Dependencies are inferred from the claim text.