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US 7,927,904 B2Granted
Method of making BIOMEMS devices
AssigneeDALSA Semiconductor Inc.
InventorsLuc Ouellet, Stephane Martel
Life of this patent
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Abstract
A MEMS device is manufactured by first forming a self-aligned monolayer (SAM) on a carrier wafer. Next, a first polymer layer is formed on the self-aligned monolayer. The first polymer layer is patterned form a microchannel cover, which is then bonded to a patterned second polymer layer on a device wafer to form microchannels. The carrier wafer is then released from the first polymer layer.
Claims14
A method of making a MEMS device comprising:
- forming a self-aligned monolayer (SAM) on a carrier wafer;
- forming a first polymer layer on said self-assembled monolayer;
- patterning said first polymer layer to form a microchannel cover;
- bonding said microchannel cover to a patterned second polymer layer on a device wafer to form microchannels;
- releasing said carrier wafer from the first polymer layer, and
- wherein said second polymer layer comprises first and second sublayers of polymer, said first sublayer is deposited first, said second sublayer is subsequently deposited on said first sublayer, and said second sublayer is then patterned to form sidewalls of the microchannels on the device wafer.
3 more elements
Dependencies are inferred from the claim text.