Apparatus for removing material from microfeature workpieces

A system for removing material from a microfeature workpiece, comprising:

• a support;
• a fixed-abrasive medium having a matrix, a surface configured to contact the workpiece, and abrasive particles attached to the matrix at the surface, wherein the fixed-abrasive medium is on the support;
• a head configured to rub a microfeature workpiece against the surface of the fixed-abrasive medium;
• an actuator operatively coupled to at least one of the support, the fixed-abrasive medium, and the head, the actuator being configured to generate oscillation of an interface between the microfeature workpiece and the surface of the fixed-abrasive medium;
• and
• a controller coupled to the actuator, wherein the controller comprises a non-transitory computer-operable medium containing instructions that cause the actuator to generate oscillation of the interface between the microfeature workpiece and the fixed-abrasive medium to control a frictional force at the interface between the workpiece and the fixed-abrasive medium.

A system for removing material from a microfeature workpiece, comprising:

• a support;
• a fixed-abrasive medium having a matrix, a surface configured to contact the workpiece, and abrasive particles attached to the matrix at the surface, wherein the fixed-abrasive medium is on the support;
• a head configured to rub a microfeature workpiece against the surface of the fixed-abrasive medium;
• an actuator operatively coupled to at least one of the support, the fixed-abrasive medium, and the head, the actuator being configured to generate vibration of an interface between the microfeature workpiece and the surface of the fixed-abrasive medium;
• a sensor configured to sense a parameter related to frictional force at the interface between the microfeature workpiece and the surface of the fixed-abrasive medium;
• and
• a controller coupled to the actuator, wherein the controller comprises a non-transitory computer-operable medium containing instructions that cause the actuator to generate vibration of the interface between the microfeature workpiece and the fixed-abrasive medium in a direction transverse to the interface based on the parameter.