Integrated transportation control for wafer fabrication facility

A method of implementing a factory automation system for a wafer fabrication facility (“fab”) comprising a plurality of bays, wherein each of the bays comprise a plurality of equipment interconnected by an intrabay overhead transport (“OHT”) system, and first and second interbay OHT systems each for interconnecting the intrabay OHT systems, the method comprising, responsive to a transfer request relating to a wafer carrier:

• obtaining lot information related to the transfer request from a manufacturing execution system (“MES”);
• obtaining traffic information related to the transfer request from a material control system (“MCS”);
• and
• using the lot information and the control information to select a destination and a route to the selected destination in fulfillment of the transfer request;
• wherein the using the lot information and control information to select a destination and a route to the selected destination comprises, if the transfer request relates to transfer of a super hot lot, routing the transfer via the first interbay OHT system.

A factory automation system for a wafer fabrication facility (“fab”) comprising a plurality of bays, wherein each of the bays comprise a plurality of equipment interconnected by an intrabay overhead transport (“OHT”) system, and first and second interbay OHT systems each for interconnecting the intrabay OHT systems, the factory automation system comprising:

• means for providing lot information regarding wafers being processed in the fab;
• means for providing traffic information regarding transportation of wafers in the fab;
• and
• means for selecting a destination and a route to the selected destination for a wafer carrier containing wafers in response to a transfer request using the lot information and the traffic information;
• wherein the means for selecting includes a super hot lot control mechanism for reducing traffic on the interbay OHT system.