Inspection apparatus using template matching method using similarity distribution

An inspection apparatus performing template matching to a search image;

• comprising:
• a template cutout means for cutting out a template from a template selection image;
• a marginal similarity calculation means for calculating marginal similarity distribution information, which is a similarity distribution of the template selection image to the template;
• a matching prime candidate selection part for selecting and cutting out an area of the search image with a high degree of similarity to the template as a matching prime candidate;
• a search image similarity calculation part for calculating search image versus prime candidate similarity distribution information, which is a similarity distribution of the search image to the matching prime candidate;
• a similarity distribution-to-similarity distribution similarity calculation means for calculating similarity distribution-to-similarity distribution similarity information between the marginal similarity distribution information and the search image versus prime candidate similarity distribution information;
• and
• a matching position determination part for determining a matching position based on the similarity distribution-to-similarity distribution similarity.