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US 7,925,073 B2Granted
Multiple optical input inspection system
AssigneeOrbotech Ltd.
InventorsSaki Itzhak Hakim, Zeev Smilansky
Life of this patent
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Abstract
A system and method of inspecting electrical circuits with multiple optical inputs, including: obtaining first and second image data that are generally spatially coincidental but which each include some image data that is different, modifying one of the images by employing the other image so as to produce an enhanced representation of the electrical circuit, and inspecting the enhanced representation for defects.
Claims21
A method of inspecting electrical circuits comprising:
- obtaining first image data relating to at least part of an electrical circuit;
- obtaining second image data relating to at least part of an electrical circuit:
- and
- non-linearly combining said first image data and said second image data to form a pseudo image, and supplying said pseudo image to a high-sure/low-sure region classifier,
- said second image data including image data relating to a plurality of visually distinguishable substrate portions, at least some substrate portions overlaying conductors, and substrate portions not overlaying conductors being redefined in said second image data as substrate portions overlaying conductors.
2 more elements
A method of inspecting electrical circuits comprising:
- obtaining first image data relating to at least part of an electrical circuit;
- obtaining second image data relating to at least part of an electrical circuit;
- and
- non-linearly combining said first image data and said second image data to form a pseudo image, and supplying said pseudo image to a high-sure/low-sure region classifier,
- said second image data including includes image data relating to a plurality of visually distinguishable substrate portions, at least some substrate portions overlaying conductors, and non-opaque substrate portions being redefined in said second image data as opaque substrate portions.
2 more elements
A method of inspecting electrical circuits comprising:
- obtaining first image data relating to at least part of an electrical circuit;
- obtaining second image data relating to at least part of an electrical circuit;
- and
- non-linearly combining said first image data and said second image data to form a pseudo image, and supplying said pseudo image to a high-sure/low-sure region classifier,
- said high-sure/low-sure classifier operating on the pseudo image to produce a high-sure/low-sure image output including at least three regions:
- (i) a low-sure region that to a high degree of confidence represents only substrate;
- (ii) a high-sure region that to a high degree of confidence represents only conductor located on the top surface of said electrical circuit;
- and
- (iii) a third region which is neither high-sure nor low-sure.
6 more elements
A system for inspecting electrical circuits comprising:
- a first image data acquisition assembly, obtaining first image data relating to at least part of an electrical circuit;
- a second image data acquisition assembly obtaining second image data relating to said at least part of an electrical circuit;
- and
- a pseudo image generator non-linearly combining said first image data and said second image data, said pseudo image generator being operative to supply a pseudo image of said part of said electrical circuit constructed from said first and second image data to a high-sure/low-sure region classifier,
- said second image data including image data relating to a plurality of visually distinguishable substrate portions, at least some substrate portions overlaying conductors, and
- said pseudo image generator redefining substrate portions not overlaying conductors in said second image data as substrate portions overlaying conductors.
3 more elements
A system for inspecting electrical circuits comprising:
- a first image data acquisition assembly, obtaining first image data relating to at least part of an electrical circuit;
- a second image data acquisition assembly obtaining second image data relating to said at least part of an electrical circuit;
- and
- a pseudo image generator non-linearly combining said first image data and said second image data, said pseudo image generator being operative to supply a pseudo image of said part of said electrical circuit constructed from said first and second image data to a high-sure/low-sure region classifier,
- said second image data including image data relating to a plurality of visually distinguishable substrate portions, at least some substrate portions overlaying conductors, and
- said pseudo image generator redefining non-opaque substrate portions in said second image data as opaque substrate portions.
3 more elements
A system for inspecting electrical circuits comprising:
- a first image data acquisition assembly, obtaining first image data relating to at least part of an electrical circuit;
- a second image data acquisition assembly obtaining second image data relating to said at least part of an electrical circuit;
- and
- a pseudo image generator non-linearly combining said first image data and said second image data, said pseudo image generator being operative to supply a pseudo image of said part of said electrical circuit constructed from said first and second image data to a high-sure/low-sure region classifier,
- said high-sure/low-sure classifier operating on the pseudo image to produce a high-sure/low-sure image output including at least three regions:
- (i) a low-sure region that to a high degree of confidence represents only substrate;
- (ii) a high-sure region that to a high degree of confidence represents only conductor located on the top surface of said electrical circuit;
- and
- (iii) a third region which is neither high-sure nor low-sure.
6 more elements
Dependencies are inferred from the claim text.