Methods for identifying array areas in dies formed on a wafer and methods for setting up such methods

A computer-implemented method for identifying array areas in dies formed on a wafer, comprising:

• comparing an array pattern in a template image acquired in one of the array areas to a search area image acquired for the wafer;
• determining areas in the search area image in which a pattern is formed that substantially matches the array pattern in the template image based on results of said comparing;
• and
• identifying the array areas in the dies formed on the wafer based on results of said determining, wherein said identifying comprises projecting the areas in the search area image onto an axis and determining discontinuities in the areas projected onto the axis as page breaks extending in a direction substantially perpendicular to the axis, and wherein said comparing, said determining the areas, and said identifying are performed using a computer system, wherein said identifying further comprises determining a difference histogram using one or more of the areas in the search area image located at different positions in the search area image, determining a threshold based on the difference histogram, and expanding one or more of the areas in the search area image using the threshold.