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US 7,924,901 B2Granted
Surface emitting laser including a metal film having a periodic fine structure
AssigneeCanon Kabushiki Kaisha
InventorMitsuhiro Ikuta
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Abstract
A surface emitting laser comprises an underlayer, an active layer formed on the underlayer, a slab layer formed on the active layer and having a photonic crystal structure optically combined with the active layer, and a metal thin film formed on the slab layer and having a periodic fine structure; and enabling taking-out of the light beam propagating in a layer-plane direction in the slab layer through the metal thin film.
Claims8
A surface emitting laser, comprising:
- an underlayer;
- an active layer formed on the underlayer, the active layer generating a light beam;
- a slab layer formed on the active layer comprising:
- a photonic crystal region optically combined with the active layer, and
- a region without the photonic crystal;
- and
- a metal thin film formed on the slab layer and having a periodic fine structure, wherein the periodic fine structure is only formed above the region of the slab layer not containing the photonic crystal, and the metal film is not formed above the photonic crystal region of the slab layer,
- wherein the periodic fine structure is constituted of periodically arranged holes having a diameter in the range from 10 nm to 10 μm, and
- wherein the light beam that is propagating in the in-plane direction in the slab layer exits the layer through the metal thin film.
6 more elements
Dependencies are inferred from the claim text.