Spatial filter, a system and method for collecting light from an object
AssigneeApplied Materials Israel Ltd.
InventorsRafi Ambar, Refael Dela-Pergola
Life of this patent
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Abstract
A spatial filter that includes multiple opaque regions and multiple transparent regions; wherein at least a pair of opaque regions out of the multiple opaque regions are much longer than a cross sectional dimension of a light beam that impinges onto the spatial filter; and wherein an axial distance between the pair of opaque regions alters as a function of a rotational angle of the spatial filter. A spatial filter that includes multiple opaque regions and multiple transparent regions; wherein multiple groups of transparent regions are substantially shaped as portions of different spirals; wherein the different spirals are characterized by different separation distances between successive spiral turnings.
Claims5
A spatial filter, comprising:
- multiple opaque regions and multiple transparent regions, each transparent region defined by adjacent ones of the opaque regions and the opaque regions having different diverging or converging ratios so that the distance between pairs of opaque regions alters as a function of a rotational angle of the spatial filter, said rotational angle defined with respect to a radial line extending from a central axis of rotation of the spatial filter;
- wherein:
- at least a first pair of opaque regions of the multiple opaque regions are much longer than a cross-sectional dimension of a light beam for impinging onto the spatial filter, an axial distance between the first pair of opaque regions constantly changes over an axial distance from the central axis of rotation of the spatial filter, a width of each opaque region of the first pair of opaque regions alters as a function of the rotational angle of the spatial filter, and the multiple opaque regions are shaped substantially as portions of different spirals, different ones of the spirals having different separation distances between successive spiral turnings.
Dependencies are inferred from the claim text.