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US 7,924,489 B2Granted
Hidden micromirror support structure
AssigneeTexas Instruments Incorporated
InventorDavid A. Rothenbury
Life of this patent
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Abstract
Methods and apparatus for use with a micromirror element includes a micromirror a micromirror having a substantially flat outer surface disposed outwardly from a support structure that is operable to at least partially support the micromirror. The support structure includes at least one layer overlying at least two discrete planes that are both substantially parallel to the outer surface of the micromirror. In one particular embodiment, the support structure includes annular-shaped sidewalls that encapsulate a photoresist plug.
Claims7
A method of forming a micromirror element comprising:
- forming a sacrificial layer;
- forming at least one micromirror support via by selectively removing an annular-shaped portion of the sacrificial layer;
- forming a first portion of a micromirror support structure within the at least one micromirror support via and a second portion of the micromirror support structure outwardly from the sacrificial layer;
- and
- forming a substantially flat micromirror surface outwardly from the first and second portions of the micromirror support structure.
2 more elements
Dependencies are inferred from the claim text.