Edge detecting device, electronic equipment, and edge detecting method using the same

An electronic device for detecting a position of an edge of an object and performing a predetermined processing, comprising:

• an emitting unit for emitting an inspection light to a linear inspecting area including said object;
• a reflective unit for reflecting said inspection light;
• a measuring circuit for measuring first light quantity of a reflected light of said inspection light reflected from said inspecting area in a first state and second light quantity of a reflected light of said inspection light from said inspecting area in a second state;
• a calculation circuit for calculating a difference of said first light quantity and said second light quantity measured by said measuring circuit for each pixel with a first predetermined length, calculating first total differences of reflected lights from pixels with a second predetermined length located adjacent to an objective dot in one direction by totalizing differences between said first and said second light quantity reflected from each of the pixels, and calculating second total differences of reflected lights from the other pixels with said second predetermined length located adjacent to the objective dot in the other direction by totalizing differences between said first and said second light quantity reflected from each of the other pixels;
• and
• a judgment circuit for judging said objective dot with the largest variation between the first total differences and the second total differences to be a position of said edge.

An edge detection method for detecting a position of an edge of an object, comprising:

• measuring first light quantity of a reflected light of an inspection light reflected from an inspecting area in a first state and second light quantity of a reflected light of said inspection light reflected from said inspecting area in a second state, said inspection light being emitted to said linear inspecting area including an object;
• calculating a difference of said first light quantity and said second light quantity for each pixel with a first predetermined length;
• calculating first total differences of reflected lights from pixels with a second predetermined length located adjacent to an objective dot in one direction by totalizing differences between said first and said second light quantity reflected from each of the pixels;
• calculating second total differences of reflected lights from the other pixels with said second predetermined length located adjacent to said objective dot in the other direction by totalizing differences between said first and said second light quantity reflected from each of the other pixels;
• judging said objective dot with the largest variation between the first total differences and the second total differences to be a position of said edge.

An edge detecting device for detecting a position of an edge of an object, comprising:

• measuring means for emitting an inspection light to a linear inspecting area including said object, and measuring first light quantity of a reflected light of said inspection light reflected from said inspecting area in a first state and second light quantity of a reflected light of said inspection light reflected from said inspecting area in a second state;
• calculation means for calculating a difference of said first light quantity and said second light quantity measured by said measuring means for each pixel with a first predetermined length, calculating first total differences of reflected lights from pixels with a second predetermined length located adjacent to an objective dot in one direction by totalizing differences between said first and said second light quantity reflected from each of the pixels, and calculating second total differences of reflected lights from the other pixels with said second predetermined length located adjacent to said objective dot in the other direction by totalizing differences between said first and said second light quantity reflected from each of the other pixels;
• and
• judging means for judging said objective dot with the largest variation between the first total differences and the second total differences to be a position of said edge.