Inspection apparatus and method
AssigneeCanon Kabushiki Kaisha
InventorsHiroshi Yoshikawa, Kenji Saitoh
Life of this patent
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Abstract
An inspection apparatus includes a captured image acquiring unit configured to acquire a captured image that is acquired by shooting an inspection target, an acquiring unit configured to acquire from the captured image a first image region and a second image region whose intensity distributions of reflected light with respect to an incident angle of illumination light emitted to the inspection target are different, and an image processing unit configured to perform image processing for performing different surface inspections on the first image region and the second image region respectively.
Claims11
An inspection apparatus comprising:
- a captured image acquiring unit configured to acquire a captured image that is acquired by shooting an inspection target;
- an acquiring unit configured to acquire from the captured image a first image region and a second image region whose intensity distributions of reflected light with respect to an incident angle of illumination light emitted to the inspection target are different;
- and
- an image processing unit configured to perform image processing for different surface inspections on the first image region and the second image region respectively.
An inspection apparatus comprising:
- a captured image acquiring unit configured to acquire a captured image that is acquired by shooting an inspection target;
- an acquiring unit configured to acquire a first image region and a second image region whose intensity distributions of reflected light with respect to an incident angle of illumination light emitted to the inspection target are different, based on the luminance distribution of the captured image;
- and
- an image processing unit configured to perform image processing for performing different surface inspections on the first image region and the second image region respectively.
A method comprising:
- acquiring a captured image that is acquired by shooting an inspection target;
- acquiring from the captured image a first image region and a second image region whose intensity distributions of reflected light with respect to an incident angle of illumination light emitted to the inspection target are different;
- and
- performing image processing for different surface inspections on the first image region and the second image region respectively.
A computer-readable storage medium storing a program of instructions which cause the computer to perform a method comprising:
- acquiring a captured image that is acquired by shooting an inspection target;
- acquiring from the captured image a first image region and a second image region whose intensity distributions of reflected light with respect to an incident angle of illumination light emitted to the inspection target are different;
- and
- performing image processing for different surface inspections on the first image region and the second image region respectively.
Dependencies are inferred from the claim text.