Method for measuring liquid immersion lithography soluble fraction in organic film
AssigneeTokyo Ohka Kogyo Co., Ltd.
InventorsNobuyuki Kohda, Masaaki Yoshida, Takayuki Yajima, Hiromitsu Tsuji
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Abstract
A method for measuring a liquid immersion lithography soluble fraction in an organic film including a mounting step of mounting a droplet of a liquid immersion medium for liquid immersion lithography on a surface of an organic film formed on a substrate; and a transfer step of transferring a component in the organic film into the droplet.
Claims10
A method for measuring a liquid immersion lithography soluble fraction in an organic film by measuring the concentration of a component exuded from the organic film formed on a substrate to a liquid immersion medium in a liquid immersion lithography process, the method comprising:
- a mounting step of mounting a droplet of a liquid immersion medium for liquid immersion lithography on a surface of the organic film formed on a substrate;
- a transfer step of transferring the component in the organic film into the droplet;
- and
- after the transfer step, a measuring step of measuring the concentration of the component exuded into the droplet.
Dependencies are inferred from the claim text.