Lamp failure detector
AssigneeApplied Materials, Inc.
InventorsOleg V. Serebryanov, Alexander Goldin, Joseph Michael Ranish
Life of this patent
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Abstract
An apparatus and method for detecting lamp failure is described for an array of lamps used in a rapid thermal processing system. The lamp failure detection system enables identification of a failed lamp among a plurality of lamps, and also provides identification of the failure type. The apparatus applies a lamp failure detection method to the voltage drop values measured across each lamp to determine if a lamp is in a failure state. In one embodiment, a field programmable gate array is used to apply a failure detection method to the lamp voltage values.
Claims17
A lamp failure detection apparatus for detecting lamp failure in an array of lamps used for thermal processing of semiconductor substrates, comprising:
- a data acquisition (DAQ) module to sample voltage signals at different sampling locations along a circuit path formed by a group of serially connected lamps in the array;
- and
- a controller adapted to detect a failure in one or more of the lamps based on voltage drops across at least two of the lamps, as determined by the sampled voltage signals.
A lamp failure detection system for detecting lamp failure in an array of lamps used for thermal processing of semiconductor substrates, comprising:
- a multiplexor for receiving a plurality of analog voltage signals sampled from different locations along circuit paths formed by groups of serially connected lamps in the array;
- an analog to digital (AID) converter to provide digital values corresponding to one or more of the analog voltage signals output by the multiplexor;
- and
- control logic adapted to control the multiplexor to select which analog voltage signals are output by the multiplexor and, for multiple groups of serially connected lamps in the array, to detect a failure in one or more of the lamps of the group based on voltage drops across at least two of the lamps, as determined by the sampled voltage signals.
A method for detecting lamp failure in an array of lamps used for thermal processing of semiconductor substrates, comprising:
- sampling voltage signals at different sampling locations along a circuit path formed by a group of serially connected lamps in the array;
- calculating voltage drops across at least two of the lamps based on the sampled voltage signals;
- and
- determining the presence or absence of a failure based on a relationship between the voltage drops, wherein the determining the presence or absence of a failure based on a relationship between the voltage drops comprises, at least:
- determining an existence of an open circuit condition of a first one of the lamps based on a zero voltage drop across a second one of the lamps;
- and
- determining an existence of a partial short of a first one of the lamps if the voltage drop across the first lamp is less than a voltage drop across a second one of the lamps by more than a threshold amount.
Dependencies are inferred from the claim text.