Piezoelectric element and method for manufacturing the same
AssigneeFujitsu Limited
InventorsShigeyoshi Umemiya, Masaharu Hida
Life of this patent
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Abstract
A coating film is formed on the whole surface area of a body part. Formation of the coating film may be done by immersing the body part in a solution of parfluoropolyether. Then, the parfluoropolyether constituting the coating film is joined with the side surfaces of the body part by irradiating Xenon excimer laser in a nitrogen atmosphere onto the side faces of the body part, or to the surface exposing an electrode layer. As a result, the protective film is formed only on the side surfaces of the body part. Thus, the protective film is formed as a monomolecular film. Total body part is then cleaned by 2,3-dihydrodecafluoropentane to remove non-reacted coating film, thereby completing a multi-layer piezoelectric element.
Claims10
A piezoelectric element comprising:
- a body part structured by alternately stacking a plurality of first electrode layers and a plurality of second electrode layers, and sandwiching a plurality of active layers between the first and second electrode layers;
- and
- a monomolecular protective film covering only a portion of a side surface of said body part, another portion of the side surface of said body being exposed from said monomolecular protective film,
- wherein said portion includes,
- all of first parts of said plurality of first electrode layers, said first parts existing directly above or directly beneath said plurality of second electrode layers in stacking direction;
- all of second parts of said plurality of second electrode layers, said second parts existing directly above or directly beneath said plurality of first electrode layers in stacking direction;
- and
- third parts of said plurality of active layers sandwiched by said first parts and second parts.
Dependencies are inferred from the claim text.