Inorganic film base plate, process for producing the same, piezoelectric device, ink jet type recording head, and ink jet type recording apparatus

An inorganic film base plate comprising:

• a surface recess-protrusion base plate, which is provided with a recess-protrusion pattern on a surface, and
• an inorganic film formed along the surface of the surface recess-protrusion base plate, the inorganic film containing a plurality of pillar-shaped structure bodies, each of which extends in a direction nonparallel with the base plate surface of the surface recess-protrusion base plate, wherein the diameter of each of the plurality of pillar-shaped structure bodies is less than the width of a recess of the recess-protrusion pattern, and less than the width of a protrusion of the recess-protrusion pattern,
• wherein the inorganic film has a structure such that an on-protrusion film region of the inorganic film, which on-protrusion film region is located on each of protruding areas constituting the recess-protrusion pattern of the surface recess-protrusion base plate, and an adjacent on-recess film region of the inorganic film, which on-recess film region is located on each of recess areas constituting the recess-protrusion pattern of the surface recess-protrusion base plate, are mechanically separated from each other.