3-1 mode capacitive membrane ultrasound transducer
AssigneeSiemens Medical Solutions USA, Inc.
InventorsNelson H. Oliver, Sean T. Hansen
Life of this patent
Estimating the term…
Abstract
A capacitive membrane ultrasound transducer is provided. Membranes or other microelectromechanical devices are provided in a 3-1 geometry, allowing application of an electric field substantially perpendicular to a range dimension. The membranes are on a plurality of different respective planes more parallel than perpendicular with each other, and the planes are more perpendicular than parallel with the faces of the elements or transducer.
Claims15
An ultrasound transducer for transmitting and/or receiving acoustic energy at faces of elements distributed substantially along azimuth and/or elevation dimensions, the transducer comprising:
- a plurality of membranes on a plurality of different respective planes more parallel than perpendicular with each other, the planes being more perpendicular than parallel with the faces, each of the membranes being separated by, at least, a gas or vacuum chamber from a first adjacent one of the membranes and free of connection at a center to a second adjacent one of the membranes, each of the membranes being separate at flexible regions from the membranes of other of the planes, and each of the membranes extending between and terminating, in the respective planes, by connection to a substrate and a respective top of a respective ridge such that separate ridges formed by pairs of the membranes are separated by the substrate and are conductively isolated;
- and
- conductive surfaces substantially on the membranes.
An ultrasound transducer for transmitting and/or receiving acoustic energy at faces of elements distributed substantially along azimuth and/or elevation dimensions, the transducer comprising:
- a plurality of flexible membranes on a plurality of different respective planes more parallel than perpendicular with each other, the planes being more perpendicular than parallel with the faces, each of the flexible membranes physically separated by a top of a ridge from a first adjacent one of the flexible membranes and by base material from a second adjacent one of the flexible membranes, the top of the ridge being structurally different from the flexible membranes;
- and
- conductive surfaces substantially on the flexible membranes and electrically isolated from the base material such that different flexible membranes have different electrical potential.
Dependencies are inferred from the claim text.