US 7,923,705 B2 · Extreme ultra violet light source apparatus

Abstract

An EUV light source apparatus capable of easily detecting deterioration etc. of a window of an EUV light generating chamber. The EUV light source apparatus includes a driver laser, an EUV light generating chamber, a window which passes the laser beam into the EUV light generating chamber, an EUV light collector mirror, laser beam focusing optics which focuses a laser beam onto a trajectory of a target material, a temperature sensor which detects a temperature of the window, and a laser beam optics deterioration determination processing unit which determines deterioration of the window based on the temperature of the window detected by the temperature sensor when extreme ultra violet light is generated.

Claims30

Dependent claims

An extreme ultra violet light source apparatus for generating extreme ultra violet light by applying a laser beam to a target material to turn the target material into plasma, said apparatus comprising:

an extreme ultra violet light generating chamber in which extreme ultra violet light is generated;
a target material supply unit for injecting a target material into said extreme ultra violet light generating chamber when the extreme ultra violet light is generated;
a driver laser for emitting a laser beam;
a window provided to said extreme ultra violet light generating chamber, for passing the laser beam into said extreme ultra violet light generating chamber;
laser beam focusing optics including at least one optical element, said laser beam focusing optics focusing the laser beam emitted from said driver laser onto a trajectory of the target material injected into said extreme ultra violet light generating chamber to generate plasma;
extreme ultra violet light collecting optics for collecting and outputting extreme ultra violet light radiated from said plasma;
a temperature sensor for detecting a temperature of said window;
and
a processing unit for determining deterioration of said window based on the temperature of said window detected by said temperature sensor when extreme ultra violet light is generated.

6 more elements

an extreme ultra violet light generating chamber in which extreme ultra violet light is generated;
a target material supply unit for injecting a target material into said extreme ultra violet light generating chamber when extreme ultra violet light is generated;
a driver laser for emitting a laser beam;
a window provided to said extreme ultra violet light generating chamber, for passing the laser beam into said extreme ultra violet light generating chamber;
laser beam focusing optics including an optical element provided in said extreme ultra violet light generating chamber, said laser beam focusing optics focusing the laser beam emitted from said driver laser onto a trajectory of the target material injected into said extreme ultra violet light generating chamber to generate plasma;
extreme ultra violet light collecting optics for collecting and outputting extreme ultra violet light radiated from said plasma;
a plurality of temperature sensors, each provided to respective one of said window and said optical element, for detecting temperatures thereof;
and
a processing unit for determining deterioration of said window and said optical element based on the temperatures of said window and said optical element detected by said plurality of temperature sensors when extreme ultra violet light is generated.

6 more elements

an extreme ultra violet light generating chamber in which extreme ultra violet light is generated;
a target material supply unit for injecting a target material into said extreme ultra violet light generating chamber when extreme ultra violet light is generated;
a driver laser for emitting a laser beam;
a window provided to said extreme ultra violet light generating chamber, for passing the laser beam into said extreme ultra violet light generating chamber;
laser beam focusing optics including an optical element provided in said extreme ultra violet light generating chamber, said laser beam focusing optics focusing the laser beam emitted from said driver laser onto a trajectory of the target material injected into said extreme ultra violet light generating chamber to generate plasma;
extreme ultra violet light collecting optics for collecting and outputting extreme ultra violet light radiated from said plasma;
a cooling channel for supplying cooling water to said window and/or said optical element;
a temperature sensor provided at a cooling water back-flow position of said cooling channel, for detecting a temperature of back-flow cooling water;
and
a processing unit for obtaining an amount of waste heat carried by the cooling water based on the temperature detected by the temperature sensor when extreme ultra violet light is generated, and determining deterioration of said window and/or said optical element based on the amount of waste heat.

7 more elements

Dependencies are inferred from the claim text.

Extreme ultra violet light source apparatus

Life of this patent

Extreme ultra violet light source apparatus

Life of this patent

Abstract

Claims30