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US 7,923,702 B2Granted
System and method for processing an object
AssigneeCarl Zeiss NTS GmbH
InventorsWolfram Buhler, Alexander Rosenthal, Emmerich Bertagnolli, Heinz Wanzenbock, Markus Fischer, Gottfried Hochleitner
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Abstract
A system and a method for processing and inspecting an object are provided, wherein the system comprises a particle beam column, an object holder and a gas supply apparatus. Thereby, the object holder is formed comprising a base, a first table displaceable relative to the base, a second table displaceable relative to the first table and a third table rotatable relative to the second table, wherein the cannula of the gas supply apparatus is fixed at the first table.
Claims19
A system for processing an object, the system comprising:
- a particle beam column having an objective lens;
- an object holder for positioning an object to be processed in front of the objective lens;
- and
- a gas supply apparatus having a cannula for supplying gas to the object positioned in front of the objective lens;
- wherein the object holder comprises:
- a base stationary with respect to the particle beam column,
- a first table mounted on the base and translationally displaceable relative to the base in a first direction,
- a second table mounted on the first table and translationally displaceable relative to the first table in a second direction, and
- a third table mounted at the second table and displaceable relative to the second table,
- wherein the cannula is fixed to the first table.
7 more elements
A processing method comprising:
- a positioning a portion of an object in an object field of a particle beam column, wherein an exit opening of a cannula is arranged close to the object field;
- wherein the positioning of the portion comprises:
- displacing a first table mounted at a base relative to the base wherein the base is stationary with respect to the particle beam column, and wherein the cannula is fixed to the first table,
- displacing a second table mounted at the first table relative to the first table, and
- displacing a third table mounted at the second table relative to the second table, then
- b processing the object by supplying gas via the cannula and activating the gas using the particle beam column;
- then
- c completing the processing the object by moving away the cannula such that its exit opening is arranged spaced apart from the object field of the particle beam column by displacing the first table relative to the base;
- d positioning the portion of the object in the object field of the particle beam column, wherein the exit opening of the cannula is arranged spaced apart from the object field by displacing the third table relative to the second table;
- and
- e acquiring a microscopic image of the portion of the object using the particle beam column.
8 more elements
A processing method comprising:
- positioning a portion of an object within an object field of a particle beam column and positioning an exit opening of a cannula close to the object field, wherein a reaction gas is allowed to flow out of the exit opening of the cannula;
- processing the object by activating the reaction gas using a particle beam generated by the particle beam column and directed to the portion of the object positioned within the object field of the particle beam column while the exit opening of the cannula is positioned close to the object field and the reaction gas is allowed to flow out of the exit opening of the cannula;
- then
- moving the exit opening of the cannula away from the object field, wherein the reaction gas is still allowed to flow out of the exit opening of the cannula;
- acquiring a microscopic image of the portion of the object by directing the particle beam generated by the particle beam column to the portion of the object positioned within the object field of the particle beam column and detecting particles emanating from the object field while the exit opening of the cannula is removed away from the object field and the reaction gas is still allowed to flow out of the exit opening of the cannula.
2 more elements
Dependencies are inferred from the claim text.