Sample inspection apparatus, sample inspection method and sample inspection system

A sample inspection apparatus comprising:

• a film having a first surface on which a sample is held such that the first surface is open to permit access to the sample during primary beam irradiation;
• a vacuum chamber for reducing the pressure of an ambient in contact with a second surface of the film;
• primary beam irradiation means connected with the vacuum chamber and irradiating the sample with a primary beam via the film;
• signal detection means for detecting a secondary signal produced from the sample in response to the irradiation;
• optical image acquisition means having an optical axis for acquiring an optical image of the sample;
• and
• overall control means for controlling operations of the primary beam irradiation means, the signal detection means, and the optical image acquisition means.

A sample inspection method comprising the steps of:

• holding a sample on a first surface of a film such that the first surface is opened to permit access to the sample during primary beam irradiation;
• irradiating the sample with a primary beam via the film from a side of a second surface of the film that is in contact with a reduced-pressure ambient;
• and
• detecting a secondary signal produced from the sample in response to the irradiation, thus obtaining information about the sample.

A sample inspection method comprising the steps of:

• irradiating a sample with a primary beam from primary beam irradiation means via a film held such that the sample is open to permit access to the sample during primary beam irradiation;
• obtaining first information about the sample produced in response to the irradiation;
• applying a physical, electrical, or chemical action to the sample;
• then irradiating the sample with the primary beam via the film;
• obtaining second information about the sample produced in response to the irradiation;
• and
• comparing the first information with the second information.