Image sensor with enhanced spatial resolution and method of producing the sensor
AssigneeThales
InventorsDaniel Gally, Luc Berthier
Life of this patent
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Abstract
An image sensor includes a scintillator comprising a substrate covered with a layer of luminescent material, the layer of luminescent material comprising a first side in contact with the substrate and a second side, the surface of which has asperities, separated by interstices, a detection radiation emerging from the second side of the layer of luminescent material when the luminescent material is illuminated by a probe radiation through the substrate, characterized in that the second side of the layer of luminescent material is covered with a film of a coating material partially absorbing the detection radiation, and moulding itself to the asperities of the surface of the second side of the layer of luminescent material.
Claims19
An image sensor including an input screen scintillator comprising:
- a substrate partially covered with needles made of a luminescent material, each of the needles having a base in contact with the substrate, a tip, and a sidewall extending from the base to the tip and being separated from adjacent needles by interstices, a detection radiation emerging from the surface of the needles when the base of the needles is illuminated by a probe radiation through the substrate, wherein
- the surface of the needles is covered from the base to the tip on all sides of the sidewall with a film of a coating material partially absorbing the detection radiation, leaving the interstices between the tips of adjacent needles and the interstices between at least a portion of the sidewalls of adjacent needles uncovered.
A method of fabricating an image sensor comprising:
- depositing a film of coating material on a surface of needles, each of the needles having a base, a tip, and a sidewall and being separated from adjacent needles by interstices, partially covering a substrate at the base of the needles and leaving the interstices between the tips of adjacent needles and interstices between at least a portion of the sidewalls of adjacent needles uncovered, the coating material partially absorbing detection radiation emerging from the surface of the needles when the base of the needles is illuminated by a probe radiation through the substrate and the depositing comprising:
- immersing, slowly, a layer of luminescent material in a coating solution including a solvent that is inert relative to a material of the substrate, the luminescent material and the coating material, the coating solution having a low surface energy;
- and
- evaporating the solvent in a dry vapor phase.
Dependencies are inferred from the claim text.