Temperature measuring device and method for measuring wafer-type thermometers
AssigneeTokyo Electron Limited
InventorsToshiyuki Matsumoto, Tomohide Minami
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Abstract
An object of the present invention is to provide a wafer-type thermometer capable of adapting itself to automation and improving the heat resistance to measure temperature distribution of a wafer and a method for manufacturing the wafer-type thermometer. A plurality of temperature sensors are arranged in regions formed by segmenting the upper surface of a wafer into a plurality of regions. Output signals from the plurality of temperature sensors are converted into temperature data by a conversion processing circuit where further processes the temperature data. The conversion processing circuit is housed in a storage room surrounded by a heat insulating member made of a nanocrystalline silicon layer.
Claims9
A wafer-type thermometer comprising:
- a wafer;
- a plurality of temperature sensors arranged in regions formed by segmenting the upper surface of said wafer into a plurality of regions;
- a conversion processing circuit configured to convert output signals from said plurality of temperature sensors into temperature data and processing said temperature data;
- and
- a storage room provided on said wafer, said storage room being surrounded by a heat insulating member made of a nanocrystalline silicon (nc-Si) layer and housing said conversion processing circuit.
A wafer-type thermometer comprising:
- a wafer;
- a plurality of temperature sensors arranged in regions formed by segmenting the upper surface of said wafer into a plurality of regions;
- conversion processing circuit configured to convert output signals from said plurality of temperature sensors into temperature data and processing the temperature data;
- a storage room provided in said wafer, said storage room being surrounded by heat insulating member and housing said conversion processing circuit;
- a Peltier thermobattery housed in said storage room so as to expose a part thereof from said storage room to the outside of said wafer, said Peltier thermobattery generating a voltage in response to a temperature difference between the temperature inside said heat insulating member and the temperature outside said heat insulating member to supply the voltage as power supply voltage to said conversion processing circuit.
A method for manufacturing a wafer-type thermometer that measures temperature of a wafer, the method comprising steps of:
- forming temperature sensors distributed in regions formed by segmenting the upper surface of said wafer into a plurality of regions;
- forming a heat insulating part made of a nanocrystalline silicon layer in an area, in which the temperature sensors are not formed, on the upper surface of said wafer;
- placing a conversion processing circuit on said heat insulating part, said conversion processing circuit being for processing output signals from said temperature sensors;
- and
- covering said conversion processing circuit by placing a cap member having a heat insulating part made of a nanocrystalline silicon layer on an area opposite the heat insulating part of said wafer.
Dependencies are inferred from the claim text.