Back to results
US 7,923,659 B2Granted
Laser machining method and laser machining apparatus
AssigneeHitachi Via Mechanics, Ltd.
InventorsKunio Arai, Yasuhiko Kita, Yasushi Ito
Life of this patent
Estimating the term…
Abstract
A laser machining method and a laser machining apparatus by which holes excelling in form accuracy can be machined efficiently are to be provided. A first cylindrical lens and/or a second cylindrical lens to correct any deformation of reflective face of a first mirror and/or a second mirror is arranged on an optical axis of a laser beam, and converging positions of the laser beam for an X-component and for a Y-component are coincident with a point on the optical axis.
Claims3
A laser machining apparatus comprising:
- an X mirror whose axis of rotation is in an X-direction,
- a Y mirror whose axis of rotation is in a Y-direction,
- a converging lens, wherein a laser being is positioned by the X mirror and the Y mirror and made to enter the converging lens, and
- an optical device arranged on an optical axis of the laser beam for correcting a curvature of a reflective surface of the X mirror or the Y mirror
- and for making converged positions of the laser beam in the X-direction and in the Y-direction coincident with a point on the optical axis,
- wherein a focal distance of the optical device is determined based on a difference between a sum of deformation extents in the X-direction and a sum of deformation extents in the Y-direction, and the deformation extents are relative to respective centers of the X mirror and the Y mirror.
3 more elements
Dependencies are inferred from the claim text.