Titania-doped quartz glass for nanoimprint molds

A titania-doped quartz glass for use as nanoimprint molds, having an internal transmittance of at least 80% with respect to UV radiation of 365 nm wavelength for a 10 mm thick layer of the glass, and

• having an internal transmittance distribution of up to 10% with respect to UV radiation of 365 nm wavelength;
• wherein internal transmittance distribution is defined as the difference between maximum and minimum values of internal transmittance as measured in random areas of a 10 mm thick layer of the glass.