Method for forming roughened surface
AssigneeASM International N.V.
InventorsHannu Huotari, Suvi Haukka
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Abstract
Methods of forming a roughened metal surface on a substrate are provided, along with structures comprising such roughened surfaces. In preferred embodiments roughened surfaces are formed by selectively depositing metal or metal oxide on a substrate surface to form discrete, three-dimensional islands. Selective deposition may be obtained, for example, by modifying process conditions to cause metal agglomeration or by treating the substrate surface to provide a limited number of discontinuous reactive sites. The roughened metal surface may be used, for example, in the manufacture of integrated circuits.
Claims19
A method for forming a roughened surface on a substrate, comprising:
- providing the substrate in a reaction space with a first surface having an initial surface termination;
- forming a discontinuous surface termination on the substrate;
- forming catalyst nanoparticles on the surface of said substrate by atomic layer deposition (ALD);
- and
- depositing carbon nanotubes on said catalyst nanoparticles.
Dependencies are inferred from the claim text.