Film formation method and apparatus for forming silicon-containing insulating film

A film formation method for a semiconductor process for forming a silicon-containing insulating film on a target substrate by CVD, in a process field configured to be selectively supplied with a first process gas comprising di-iso-propylaminosilane gas and a second process gas comprising an oxidizing gas or nitiriding gas, the method being arranged to perform a cycle a plurality of times to laminate thin films formed by respective times, thereby forming the silicon-containing insulating film with a predetermined thickness, the cycle alternately comprising:

• a first step of performing supply of the first process gas to the process field while maintaining a shut-off state of supply of the second process gas to the process field, thereby forming an adsorption layer containing silicon on a surface of the target substrate;
• and
• a second step of performing supply of the second process gas to the process field while maintaining a shut-off state of supply of the first process gas to the process field, thereby oxidizing or nitiriding the adsorption layer on the surface of the target substrate, the second step comprising an excitation period of supplying the second process gas to the process field while exciting the second process gas by an exciting mechanism.