Semiconductor device and method of forming the device using sacrificial carrier

A method of making a semiconductor device, comprising:

• providing a metal carrier;
• forming a photoresist layer over the metal carrier;
• forming openings in the photoresist layer extending to the metal carrier;
• selectively electroplating a first conductive material in the openings of the photoresist layer using the metal carrier as an electroplating current path to form wettable contact pads;
• mounting a first semiconductor die directly to the wettable contact pads with a plurality of bumps to align the first semiconductor die with respect to the wettable contact pads;
• depositing a first encapsulant over the first semiconductor die;
• removing the metal carrier;
• forming an interconnect structure over the first encapsulant and electrically connected to the wettable contact pads;
• forming vias through the first encapsulant over and extending to the wettable contact pads;
• and
• depositing a second conductive material in the vias, the second conductive material in the vias being aligned by the wettable contact pads with respect to the first semiconductor die to reduce interconnect pitch.