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US 7,923,293 B2Granted
Method for manufacturing a semiconductor device wherein the electrical connection between two components is provided by capillary phenomenon of a liquid conductor material in a cavity therebetween
AssigneeSeiko Epson Corporation
InventorChiharu Iriguchi
Life of this patent
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Abstract
A method for manufacturing a semiconductor device includes: (a) transferring an electronic component that has an electrode and formed on a first substrate from the first substrate to a second substrate; and (b) forming a wiring line electrically coupling the electrode and a terminal on the second substrate. A cavity is provided between the electrode of the electronic component transferred on the second substrate and the second substrate, and the wiring line is formed in the cavity.
Claims5
A method for manufacturing a semiconductor device, comprising the steps of:
- providing an electronic component to a second substrate;
- bonding a second insulation film to the second substrate with an adhesive;
- forming a wiring line electrically coupling an electrode of the electronic component and a terminal of the second substrate by coating a liquid material containing a conductive material,
- wherein the electronic component includes:
- at least a first insulation film,
- a second insulation film, and
- the electrode, wherein the electrode includes a first portion and a second portion, the first portion being disposed between the first insulation film and the second insulation film, and the second portion being exposed by the second insulation film,
- forming a first portion of the wiring line between the electrode and the second substrate such that the first portion of the wiring line contacts opposing surfaces of the second substrate and the electrode;
- and
- forming a second portion of the wiring line between the first insulation film and the second substrate such that the second portion of the wiring line contacts opposing surfaces of the first insulation film and the second substrate;
- wherein the wiring line is formed by filing a cavity that is formed between the second portion and the second substrate with the liquid material.
8 more elements
Dependencies are inferred from the claim text.