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US 7,923,194 B2Granted
Sacrificial compositions and methods of fabricating a structure using sacrificial compositions
AssigneeGeorgia Tech Research Corporation
InventorsPaul A. Kohl, Paul J. Joseph, Hollie K. Reed, Sue Ann Bidstrup-Allen, Celesta E. White, Clifford Henderson
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Abstract
Compositions, methods of use thereof, and methods of decomposition thereof, are provided. One exemplary composition, among others, includes a polymer and a catalytic amount of a negative tone photoinitiator.
Claims7
A method for fabricating a structure, comprising:
- disposing a composition onto a surface, wherein the composition includes a sacrificial polymer and a catalytic amount of photoacid generator;
- exposing a portion of the composition to energy;
- and
- removing the portion of the composition exposed to energy to form an air-gap in the composition via heating the composition to about 100 to 180° C.,
- where said sacrificial polymer is chosen from a polycarbonate.
2 more elements
Dependencies are inferred from the claim text.