Fabrication of composite materials using atomic layer deposition
AssigneeLotus Applied Technology, LLC
InventorsEric R. Dickey, William A. Barrow
Life of this patent
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Abstract
Methods of constructing composite films including particles embedded in a filler matrix involve preparing a collection of stacked particles, then depositing a matrix material throughout the particle collection using an atomic layer deposition (ALD) method so as to substantially completely fill the spaces between the particles with the matrix material. During matrix deposition, a vapor phase etch cycle may be periodically employed to avoid clogging of small pores in the particle collection. New composite materials formed by such methods are also disclosed.
Claims11
A method of producing a composite film, comprising:
- (a) placing a cluster of particles into a reaction space, the cluster defining inter-particulate spaces in fluid communication with the reaction space;
- (b) introducing a first precursor chemical into the reaction space so that the first precursor chemical infiltrates the inter-particulate spaces and adsorbs to surfaces of the particles bordering the inter-particulate spaces;
- (c) after step (b), purging the reaction space until excess non-adsorbed amounts of the first precursor chemical are substantially removed from the reaction space, but non-adsorbed residual amounts of the first precursor chemical remain within the inter-particulate spaces;
- (d) after step (c), introducing a second precursor chemical into the reaction space, wherein the second precursor chemical infiltrates the inter-particulate spaces and reacts with the first precursor chemical, including reacting with the non-adsorbed residual first precursor chemical, to form a deposit of filler material on the surfaces of the particles and in the inter-particulate spaces;
- (e) removing excess amounts of the second precursor chemical from the reaction space;
- and
- (f) repeating the steps (b) through (e) until the particles are embedded in the filler material.
A method of producing a composite film, comprising:
- (a) placing a cluster of particles into a reaction space, the cluster defining inter-particulate spaces in fluid communication with the reaction space;
- (b) introducing a first precursor chemical into the reaction space so that the first precursor chemical infiltrates the inter-particulate spaces and adsorbs to surfaces of the particles bordering the inter-particulate spaces;
- (c) purging the reaction space until excess non-adsorbed amounts of the first precursor chemical are substantially removed from the reaction space;
- (d) introducing a second precursor chemical into the reaction space, wherein the second precursor chemical infiltrates the inter-particulate spaces and reacts with the first precursor chemical to form a deposit of filler material on the surfaces of the particles;
- (e) removing excess amounts of the second precursor chemical from the reaction space;
- (f) etching at least a portion of accumulated filler matrix material preferentially from an outer surface of the cluster of particles and from inlets to at least some of the inter-particulate spaces without removing substantial portions of the particles;
- and
- (g) repeating the steps (b) through (e) until the particles are embedded in the filler material, and repeating the step (f) at least one additional time during repeating the steps (b) through (e).
Dependencies are inferred from the claim text.