US 7,922,979 B2 · Silent discharge plasma apparatus

Abstract

A silent discharge plasma apparatus includes a dielectric member, a pair of electrodes opposed to each other across the dielectric member and an alternating-current source applying an alternating-current voltage between the electrodes and causing a discharge. A gas is supplied to a discharge space, where discharge occurs, and a plasma is produced. At least one of the electrodes includes a conductive power feeding thin film on the dielectric member. When the dielectric member is destroyed and an arc discharge develops between the electrodes, the power feeding thin film is eliminated or oxidized, and the arc discharge is stopped.

Claims18

Dependent claims

A silent discharge plasma apparatus comprising:

a dielectric member having a surface;
a pair of electrodes opposed to each other across said dielectric member;
and
an alternating-current source electrically connected to said pair of electrodes, for applying an alternating-current voltage between said electrodes and for causing a discharge in a gas supplied to a discharge space where the discharge occurs, creating a plasma, wherein
at least one of said electrodes includes a conductive power feeding thin film on said dielectric member, and,
when said dielectric member is destroyed and an arc discharge develops between said pair of electrodes, said power feeding thin film is eliminated and the arc discharge is stopped.

3 more elements

Dependencies are inferred from the claim text.

Silent discharge plasma apparatus

Life of this patent

Silent discharge plasma apparatus

Life of this patent

Abstract

Claims18