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US 7,922,888 B2Granted
Post and tip design for a probe contact
AssigneeTouchdown Technologies, Inc.
InventorsSalleh Ismail, Nim Tea, Yang Hsu, Weilong Tang, Raffi Garabedian, Melvin Khoo
Life of this patent
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Abstract
The present invention relates to A microfabricated tip and post structure comprising a post having a rough top surface that diffuses incident light and a cross-section, and a tip, lithographically plated on the rough top surface of the post, having a smooth reflective surface appropriate for automatic vision recognition, and having a cross-section that is less than the cross-section of the post.
Claims14
The method of creating a microfabricated structure, comprising:
- lithographically pattern-plating a post on a surface of a microfabricated probe structure;
- rough plating a top surface of the post to form a roughened surface, said roughened surface having an area, and said roughened surface having a property of at least one of diffusing, diffracting, or absorbing light;
- lithographically pattern-plating a tip having a smaller area than the area of the roughened surface of the post on the top surface of the post, said tip having a reflective surface suitable for machine vision recognition.
A method of forming a microfabricated structure, comprising:
- lithographically pattern-plating a post on a surface of a microfabricated probe structure;
- lithographically pattern-plating a tip having a smaller area than the area of the top surface of the post on the top surface of the post creating an exposed portion of the top surface of the post and an unexposed portion of the top surface of the post, said tip having a smooth reflective surface appropriate for automatic vision recognition and side walls;
- and
- plating a skirt over the exposed portion of the top surface of the post and at least over a portion of the side walls of the tip, said skirt having a property of one of diffusing light or absorbing light.
1 more element
Dependencies are inferred from the claim text.