Quick-change precursor manifold for large-area CVD and PECVD

A tube-array showerhead, comprising:

• two precursor plena, each having at least one plenum inlet for receiving precursors to be distributed,
• two manifold blocks, attached to the precursor plena and each having at least one precursor inlet for receiving precursors from the attached plenum,
• at least one pair of tube seals, where one of the seals in each pair is inserted in each manifold block to seal the precursor inlet,
• at least one compressible spring attached to at least one of the manifold blocks opposite the tube seal,
• at least one pair of holding-stubs, where
• one of the holding-stubs in each pair is sealed into each of the manifold blocks by the tube seal inserted in the manifold block, and
• at least one of the holding-stubs is spring-loaded by the compressible spring;
• at least one hollow tube,
• held at each end by one of the holding-stubs,
• compressed along its longitudinal axis by the compression spring, and
• having at least one lateral hole to distribute the received precursors,
• at least one electrical source capable of generating an electric field to excite precursors into a plasma,
• at least one electrical connection to the electrical source through at least one of the manifold blocks, and
• at least one electrical insulator configured and positioned to insulate the electrical connection from the manifold block and from any other nearby electrical connections,
• where at least one of the electrical connections connects the electrical source to at least one of the holding-stubs, and
• each of the connected holding-stubs has a conductive portion that conducts electricity from the holding-stub to the hollow tube held by the holding-stub.