Source, an arrangement for installing a source, and a method for installing and removing a source
AssigneeBeneq Oy
InventorPekka Soininen
Life of this patent
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Abstract
The invention relates to an arrangement for installing a source into a gas deposition reactor. The arrangement comprises at least one source fitting for the source such that the source fitting is connected to a reaction space of the gas deposition reactor, and a source installable at least partly inside the source fitting or a source space connected to the source fitting. According to the invention, the arrangement further comprises reception means in the source fitting for receiving the source, and charging means for installing the source in place in the source fitting for use, and a chamber (1), provided in the source, for a solid or liquid source material (3), and isolating means (7, 19) for isolating the chamber (1) substantially from environment.
Claims18
A source of a solid or liquid material for gas deposition reactors, the source being insertable at least partly inside a fitting connected to a reaction space of a gas deposition reactor, the source comprising a bar element which has a first end and a second end, a chamber for a solid or liquid source material arranged on the second end of the bar element or in a vicinity thereof, the chamber comprising at least one at least partly open wall, and a tube arranged over the bar element, wherein the tube is arranged to form a cover-like isolating means arranged onto the at least partly open wall of the chamber for isolating the chamber from environment, such that the tube and the chamber are arranged to be slid with respect to one another in order to open or close the chamber after the source is installed in the fitting.
Dependencies are inferred from the claim text.