Method and device for feeding arsenic dopant into a silicon crystal growing apparatus
AssigneeMEMC Electronic Materials, Inc.
InventorsMassoud Javidi, Steve Garner
Life of this patent
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Abstract
A feed assembly and method of use thereof of the present invention is used for the addition of a high pressure dopant such as arsenic into a silicon melt for CZ growth of semiconductor silicon crystals. The feed assembly includes a vessel-and-valve assembly for holding dopant, and a feed tube assembly, attached to the vessel-and-valve assembly for delivering dopant to a silicon melt. An actuator is connected to the feed tube assembly and a receiving tube for advancing and retracting the feed tube assembly to and from the surface of the silicon melt. A brake assembly is attached to the actuator and the receiving tube for restricting movement of the feed tube assembly and locking the feed tube assembly at a selected position.
Claims8
A feed assembly for feeding a dopant to a silicon melt in a crystal growing apparatus comprising:
- a vessel for holding and releasing a dopant solid material;
- an elongate feed tube operatively connected to the vessel, said feed tube comprising a fixed tube and a movable tube concentrically arranged with the fixed tube;
- and
- an actuator connected to said moveable tube for moving the moveable tube relative to the fixed tube for advancing the moveable tube toward an upper surface of the silicon melt in the apparatus and retracting the moveable tube away from the upper surface of the silicon melt to selectively position the moveable tube for introducing the dopant material released from the vessel to the silicon melt when the feed assembly is mounted on the crystal growing apparatus, the actuator comprising a linear translator attached to the moveable tube, the linear translator comprising a magnet fixed to the moveable tube and a slide magnetically coupled with and adjacent the magnet, the magnet and moveable tube being configured to move in response to movement of the slide.
A feed assembly for feeding a dopant to a silicon melt in a crystal growing apparatus comprising:
- a vessel for holding and releasing a dopant solid material;
- an elongate feed tube operatively connected to the vessel, said feed tube comprising a fixed tube and a movable tube having a tip concentrically arranged with the fixed tube;
- and
- an actuator connected to said moveable tube for moving the moveable tube relative to the fixed tube for advancing the moveable tube toward an upper surface of the silicon melt in the apparatus and retracting the moveable tube away from the upper surface of the silicon melt to selectively position the moveable tube for introducing the dopant material released from the vessel to the silicon melt when the feed assembly is mounted on the crystal growing apparatus, the actuator being configured to move the tip of the movable tube closer to the silicon melt than the fixed tube;
- wherein the actuator comprises a linear translator attached to the moveable tube, the linear translator comprising a magnet fixed to the moveable tube and a slide magnetically coupled with and adjacent the magnet, the magnet and moveable tube being configured to move in response to movement of the slide.
Dependencies are inferred from the claim text.